Study of morphological, physical and mechanical properties of thin NbN films synthesized via DC magnetron sputtering system
-
Published:2023-05-18
Issue:
Volume:
Page:
-
ISSN:1708-5284
-
Container-title:World Journal of Engineering
-
language:en
-
Short-container-title:WJE
Author:
Abdallah Bassam,Kakhia Mahmoud,Masloub Karam,Zetoune Walaa
Abstract
PurposeNiobium Nitride (NbN) was interesting material for its applications in the medicinal tools or tools field (corresponding to saline serum media) as well as in mechanical properties. The aim of this work was depositing NbN thin films on two types of substrates (stainless steel (SS304) and silicon (100)) using plasma technique at varied powers (100–150 W).Design/methodology/approachDC magnetron sputtering technique at different powers were used to synthesis NbN films. Film structure was studied using X-ray diffraction (XRD) pattern. Rutherford elastic backscattering and energy dispersive X-ray were used to examine the deposited film composition. The films morphology was studied via atomic force microscopy and scanning electron microscopy images. Corrosion resistance of the three NbN/SS304 films was studied in 0.9% NaCl environment (physiological standard saline).FindingsAll properties could be controlled by the modification of DC power, where the crystallinity of samples was changed and consequently the corrosion and microhardness were modified, which correlated with the power. NbN film deposited at higher power (150 W) has shown better corrosion resistance (0.9% NaCl), which had smaller grain size (smoother) and was thicker.Originality/valueThe NbN films have a preferred orientation (111) matching to cubic structure phase. Corrosion resistance was enhanced for the NbN films compared to SS304 substrates (noncoating). Therefore, NbN films deposited on SS304 substrate could be applied as medicinal tools as well as in mechanical fields.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Geotechnical Engineering and Engineering Geology,Civil and Structural Engineering
Reference41 articles.
1. Ion beam measurements for the investigation of tin thin films deposited on different substrates by vacuum arc discharge;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,2019
2. Characterization of TIALV films prepared by vacuum arc deposition: effect of substrate temperature;Acta Physica Polonica A,2013
3. Oxygen effect on structural and optical properties of ZNO thin films deposited by RF magnetron sputtering;Materials Research,2017
4. Deposition of tin and tialvn thin films by dc magnetron sputtering: composition, corrosion and mechanical study;International Journal of Structural Integrity,2019
5. Deposition of ti6al4v thin films by dc magnetron sputtering: effect of the current on structural, corrosion and mechanical properties;Iranian Journal of Science and Technology, Transactions A: Science,2018
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献