Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering
Author:
Publisher
Springer Science and Business Media LLC
Subject
Pollution,General Materials Science,Environmental Chemistry
Link
https://link.springer.com/content/pdf/10.1007/s41810-021-00122-5.pdf
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2. Abdallah B, Naddaf M, A-Kharroub M (2013) Structural, mechanical, electrical and wetting properties of ZrNx films deposited by Ar/N2 vacuum arc discharge: effect of nitrogen partial pressure. Nucl Instrum Meth B 298(55):60. https://doi.org/10.1016/j.nimb.2013.01.003
3. Abdallah B, Jazmati AK, Refaai R (2017) Oxygen effect on structural and optical properties of ZnO thin films deposited by RF magnetron sputtering. Mater Res 20(3):607–612. https://doi.org/10.1590/1980-5373-mr-2016-0478
4. Abdallah B, Jazmati AK, Kakhia M (2018a) Physical, optical and sensing properties of sprayed zinc doped tin oxide films. Optik 158:1113–1122. https://doi.org/10.1016/j.ijleo.2018.01.008
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