Influence of particulates generated in a CH4low pressure radiofrequency discharge on dc negative self bias voltage
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2000146/pdf
Reference22 articles.
1. In situ laser diagnostic studies of plasma‐generated particulate contamination
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