Optical diagnostic and electrical analysis in dusty RF discharges containing plasmoids
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4934249
Reference48 articles.
1. Particulate formation and dusty plasma behaviour in argon-silane RF discharge
2. Investigations of CH4, C2H2and C2H4dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry
3. Particulate growth in a 13.56 MHz radiofrequency methane plasma: influence of the flow rate and the incident rf power
4. Influence of particulates generated in a CH4low pressure radiofrequency discharge on dc negative self bias voltage
5. Merging and Splitting of Plasma Spheroids in a Dusty Plasma
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