Plasma chemistry and dust-particle generation in pure methane plasma: Influence of the RF electrode cleanliness-Reference-Cited by-同舟云学术

Plasma chemistry and dust-particle generation in pure methane plasma: Influence of the RF electrode cleanliness

Published:2019-08-14 Issue:6 Volume:126 Page:063301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Géraud-Grenier I.¹,Mikikian M.²^ORCID,Faubert F.¹,Massereau-Guilbaud V.¹

Affiliation:

1. Groupe de Recherches sur l’Energétique des Milieux Ionisés (GREMI), UMR 7344 CNRS/Université d’Orléans, Site de l’IUT de Bourges, 63 avenue de Lattre de Tassigny, 18020 Bourges Cedex, France

2. Groupe de Recherches sur l’Energétique des Milieux Ionisés (GREMI), UMR 7344 CNRS/Université d’Orléans, 14 rue d’Issoudun, 45067 Orléans Cedex 2, France

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5099326

Reference54 articles.

1. A New Type of Electric Discharge: the Streamer Discharge

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5. Formation of antireflection nanostructure for silicon solar cells using catalysis of single nano-sized silver particle

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