Particulates in aluminum sputtering discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346081
Reference15 articles.
1. Contamination reduction in vacuum processing systems
2. In situ laser diagnostic studies of plasma‐generated particulate contamination
3. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
4. Apparatus Design for Glow-Discharge a-Si: H Film-Deposition
5. Investigation of the Sputtering of Aluminum Using Atomic‐Absorption Spectroscopy
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