Synthesis and Thermal Decomposition Mechanism Study of a Novel Iridium Precursor
Author:
Publisher
EDP Sciences
Subject
General Medicine
Link
http://www.matec-conferences.org/10.1051/matecconf/20164301002/pdf
Reference17 articles.
1. Atomic Layer Deposition of Noble Metals and Their Oxides
2. Long-term high-temperature oxidation of iridium coated rhenium by electrical resistance heating method
3. The Effect of Iridium Bottom Electrode on the Characteristics of Pb(Zr,Ti)O3 Films Grown by MOCVD Method
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