New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials-Reference-Cited by-同舟云学术

New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials

Published:2005-11 Issue: Volume:297-300 Page:545-550
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Park Jun Hyub¹,Kim Chung Youb,Choa Sung Hoon²,Lee Chang Seung²,Che Woo Seong³,Song Ji Ho⁴

Affiliation:

1. Tongmyong University

2. Samsung Advanced Institute of Technology

3. Tongmyong University of Information Technology

4. Korea Advanced Institute of Science and Technology

Abstract

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems (MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an axial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.297-300.545.pdf

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