Mechanical property measurements of thin films using load-deflection of composite rectangular membrane-Reference-Cited by-同舟云学术

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Mechanical property measurements of thin films using load-deflection of composite rectangular membrane

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Container-title:IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'
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Author:

Tabata O.,Kawahata K.,Sugiyama S.,Igarashi I.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx2/866/2575/00077981.pdf?arnumber=77981

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3. Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography;Microelectronic Engineering;2015-08

4. Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices;Journal of Applied Physics;2015-06-28

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