Design of a MEMS piezoresistive differential pressure sensor with small thermal hysteresis for air data modules-Reference-Cited by-同舟云学术

Design of a MEMS piezoresistive differential pressure sensor with small thermal hysteresis for air data modules

Published:2015-06 Issue:6 Volume:86 Page:065003
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Song Jin Woo¹^ORCID,Lee Jang-Sub²,An Jun-Eon³,Park Chan Gook⁴

Affiliation:

1. BK21Plus Transformative Training Program for Creative Mechanical and Aerospace Engineers, Department of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak, Seoul 151-744, South Korea

2. Microinfinity Co., Ltd., 109 Gwanggyo, Suwon, Gyeonggi 443-270, South Korea

3. Agency for Defense Development, Bugyuseong-daero 488 beon-gil, Yuseong, Daejeon 305-152, South Korea

4. Department of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak, Seoul 151-744, South Korea

Funder

Agency for Defense Development (ADD)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4921862

Reference57 articles.

1. A. Cho, Y.S. Kang, B.J. Park, C.S. Yoo, and S.O. Koo, in 2012 12th International Conference on Control, Automation and Systems (ICCAS), (2012), pp. 433–436.

2. An Improvement to an Algorithm for Computing Aircraft Reference Altitude

3. W. Gracey, “Measurement of aircraft speed and altitude,” Report, DTIC Document, 1980.

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability;Measurement;2024-02

2. Development of IOT-based low-cost MEMS pressure sensor for groundwater level monitoring;Measurement Science and Technology;2023-07-27

3. Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review;Micromachines;2023-07-27

4. A High-Sensitivity Resonant Differential Pressure Microsensor Based on Wafer-Level Eutectic Bonding;IEEE Transactions on Electron Devices;2023-05

5. Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications;Journal of Microelectromechanical Systems;2023-02