Structure Design of the Single-Axis Piezoelectric Actuated Stage Using a 4-9-9-14 Piezoelectric Actuator

Abstract

In this paper, a novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive a piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. According to the rotational speed experiment, the CW/CCW ratio of the 4-9-9-14 piezoelectric actuator is probably 1:0.8. The movement of the pie-zoelectric actuated stage is read and analyzed by means of data acquisition card and LabVIEW software operating in conjunction with a linear encoder. In a natural environment, plenty of noise interferes with linear encoder signals and results in erroneous addition performed by a counter. Therefore, the LabVIEW program set forth the means of filtering and the method for retrieving a correct position signal.