Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

Abstract

In this paper, a novel thin-disc piezoelectric actuator, 4-9-9-14 piezoelectric actuator, is used to construct and drive the micro/nanometer level biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement signals of the piezoelectric actuated stage are read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear optical scale. The new consideration of tuning Ton time is used in place of the traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. A combined driving signal is based on the sum of a continuous driving signal for Ton time and a DC signal for Ton time; the combined driving signal is continuously output in this manner to form a continuous driving pulse chain. Under a constant driving voltage, the displacement of the stage increases with Ton time and the displacement of the stage decreases with Ton time.