Structure Design of the Biaxial Piezoelectric Actuated Stage Using a Novel Disk Piezoelectric Actuator

Abstract

In this paper, a novel disk piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive a biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement of a stage is read and analyzed by means of LabVIEW operating in conjunction with an optical scale. Stage movement-related signals read by the optical scale are processed. With a human-machine interface of LabVIEW, the movement of the stage is depicted by a waveform chart to thereby facilitate the observation of the waveform chart and the understanding of propulsion of the stage by the actuator.