Stepping Experiment and Characteristics Analysis of a Novel Biaxial Piezoelectric Actuated Stage

Abstract

In this research, our research team used the self-designed piezoelectric actuator to achieve the micro/nanometer level precise positioning biaxial piezoelectric actuated stage through the redesign of stage mechanism. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear encoder. The new consideration of tuning time Tonis used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the displacement of the stage increases with time Ton, and the displacement of the stage decreases with time Ton. The aforesaid phenomenon occurs to leftward or rightward movement of the upper stage and forward or backward movement of the lower stage. Given a constant time Ton, the displacement of the stage in motion decreases with the driving voltage, and the displacement of the stage in motion increases with the driving voltage.