Effects of Initial Nitridation on the Characteristics of SiC-SiO2 Interfaces
Author:
Affiliation:
1. Griffith University
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.433-436.583.pdf
Reference12 articles.
1. M.A. Capano and R.J. Trew, MRS Bulletin, March (1997), p.19.
2. H. Linewih, S. Dimitrijev, C.E. Weitzel and H.B. Harrison, IEEE Trans. Electron Dev. Vol. 48 (2001), p.1711.
3. J.A. Cooper, Jr., M.R. Melloch, R. Singh, A. Agarwal and J.W. Palmour, IEEE Trans Electron Dev. Vol. 49 (2002), p.658.
4. S. Dimitrijev, K.Y. Cheong, J. Han and H.B. Harrison, Appl. Phys. Lett. Vol. 80 (2002), p.3421.
5. K.Y. Cheong and S. Dimitrijev, IEEE Electron Dev. Lett. Vol. 23 (2002), p.404.
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