Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy
Author:
Affiliation:
1. Consiglio Nazionale delle Ricerche (CNR)
2. Università di Catania
3. Consiglio Nazionale delle Ricerche, Istituto di Microelettronica e Microsistemi CNR-IMM
4. Istituto per la Microelettronica e Microsistemi IMM-CNR
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.433-436.375.pdf
Reference5 articles.
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3. F. Giannazzo, L. Calcagno, F. Roccaforte, P. Musumeci, F. La Via, V. Raineri , Appl. Surf. Sci., 184, (2001) p.183.
4. D. Aberg, A. Hallen, P. Pellegrino, and B.G. Svensoon, Appl. Phys. Lett. 78, (2001) p.2908.
5. Th. Lingner, S. Greulich-Weber, J.M. Spaeth, U. Gerstmann, E. Rauls, Z. Hajnal, Th. Frauenheim, and H. Overhof, Phys. Rev. B 64, (2001).
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