A Planar Capacitive Sensor for Large Scale Measurement-Reference-Cited by-同舟云学术

A Planar Capacitive Sensor for Large Scale Measurement

Published:2008-06 Issue: Volume:381-382 Page:509-512
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Wang Wen¹,Li X.X.¹,Chen Zi Chen¹

Affiliation:

1. Zhejiang University

Abstract

A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.381-382.509.pdf

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