A new two-dimensional capacitive position transducer

Author:

Bonse M.H.W.,Zhu F.,Spronck J.W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Development of capacitive position transducers through a mechatronic approach;Zhu,1992

2. A long-range capacitive displacement sensor having micrometre resolution;Bonse;Meas. Sci. Technol.,1993

3. Capacitive position transducers; possibilities in modern machining and manufacturing;Spronck;8th Ann. Meet. ASPE, Seattle, WA, USA,1993

4. Application of capacitance techniques in transducer design;Heerens;J. Phys. E: Sci. Instrum.,1986

5. A capacitive absolute position transducer;Zhu;Proc. Seventh Int. Precision Engineering Seminar, Kobe, Japan,17211993

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