A planar capacitive sensor for 2D long-range displacement measurement
Author:
Publisher
Zhejiang University Press
Subject
General Engineering
Link
http://link.springer.com/content/pdf/10.1631/jzus.C12MNT03.pdf
Reference14 articles.
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3. Bonse, M.H.W., Zhu, F., Spronck, J.W., 1994. A new two-dimensional capacitive position transducer. Sens. Actuat. A, 41(1-3):29–32. [doi:10.1016/0924-4247(94)80082-0]
4. Chang, S., Lee, J., 2010. Design of a long range nano-scale resolution mechanism. J. Zhejiang Univ.-Sci. A (Appl. Phys. & Eng.), 11(4):250–254. [doi:10.1631/jzus.A1000 029]
5. Furuichi, H., Fearing, R.S., 1996. A Planar Capacitive Micro Positioning Sensor. Proc. 7th Int. Symp. on Micro Machine and Human Science, p.85–90. [doi:10.1109/MHS.1996.563406]
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