Design of a long range nano-scale resolution mechanism
Author:
Publisher
Zhejiang University Press
Subject
General Engineering
Link
http://link.springer.com/content/pdf/10.1631/jzus.A1000029.pdf
Reference8 articles.
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3. Kimiyuki, M., Goto, T., 1996. Development of Dual Servo STM. ASPE Proceedings, 14:146–149.
4. Liu, H.Z., Lu, B.H., Ding, Y.C., Tang, Y.P., Li, D.C., 2003. A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation. Journal of Micromechanics and Microengineering, 13(2):295–299. [doi:10.1088/0960-1317/13/2/318]
5. Losilla, N.S., Oxtoby, N.S., Martinez, J., Garcia, F., Garcia, R., Mas-Torrent, M., Veciana, J., Rovira, C., 2008. Sub-50 nm positioning of organic compounds onto silicon oxide patterns fabricated by local oxidation nanolithography. Nanotechnology, 19(45):455308–455314. [doi:10.1088/0957-4484/19/45/455308]
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1. A planar capacitive sensor for 2D long-range displacement measurement;Journal of Zhejiang University SCIENCE C;2013-04
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