Abstract
A new method of two-dimensional (2D) plane displacement measurement based on an eddy current sensor is proposed in this paper. A series of grooves with different widths and depths are graved on the linear displacement table to form 2D absolute coding using the idea of pseudorandom coding. The eddy current sensor array is arranged above the groove to identify the coding. An artificial neural network is used to establish a measurement model which is the mapping relationship between the output of the eddy current sensor array and the 2D displacement of the workbench. A feasibility experiment showed that in the range of 20 × 20 mm, the root mean square error of measurement in the X- and Y-directions are 83 and 73 μm, respectively. The new method integrates eddy current sensor and artificial neural network modeling to realize 2D displacement measurement, which provides a new solution for displacement and angle measurement.
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Control and Optimization,Mechanical Engineering,Computer Science (miscellaneous),Control and Systems Engineering
Reference24 articles.
1. A Long-Stroke Nano-positioning Control System of the Coplanar Stage;Wang;IEEE/ASME Trans. Mechatron.,2014
2. Development and characterization of a high-sensitivity fiber Bragg grating-based vibrating nano-probe for 3D measurement;Liu;Sens. Rev.,2019
3. Wang, H.-Y., Liao, B.-H., Chou, M.-J., Tseng, Y.-Y., and Fan, K.-C. (2013, January 8–12). Development of a miniature multi-degree-of-freedom measurement system for ultra precision stages. Proceedings of the International Symposium on Precision Mechanical Measurements, Guiyang, China.
4. Research progress of micro nano CMM probe;Huang;China Mech. Eng.,2013
5. A contact probe using Michelson interferometers for CMMs;Huang;Proc. SPIE,2013
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