Research trends in China for macro-micro motion platform for microelectronics manufacturing industry-Reference-Cited by-同舟云学术

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Research trends in China for macro-micro motion platform for microelectronics manufacturing industry

Published:2021 Issue:3 Volume:15 Page:JAMDSM0032-JAMDSM0032
ISSN:1881-3054
Container-title:Journal of Advanced Mechanical Design, Systems, and Manufacturing
language:en
Short-container-title:JAMDSM

Author:

LI Xueli¹,ZHANG Lufan²,JIANG Boshi²,FANG Jiwen³,ZHENG Yaxin²

Affiliation:

1. School of Mechanical and Electronic Engineering, Zhongyuan University of Technology

2. School of Mechanical and Electrical Engineering, Henan University of Technology

3. School of Mechanism Engineering, Jiangsu University of Science and Technology

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/jamdsm/15/3/15_2021jamdsm0032/_pdf

Reference75 articles.

1. Adriaens H, Koning WL, Banning R, Modeling piezoelectric actuators, IEEE ASME Trans Mechatronics, Vol.5, No. 4, (2000), pp. 331–341.

2. Allan A, Edenfeld D, Joyner W.H, Kahng A.B, Rodgers M, Zorian Y, 2001 technology roadmap for semiconductors, Computer, Vol. 35, No. 1, (2002), pp 42-53.

3. Amsden, A., The division of labor is limited by the rate of growth of the market: the Taiwanese machine tool industry. Cambridge journal of economics, 9 (4), (1985), pp. 271–284.

4. Borodin S, Kim J-D, Kim H-J, et al., Nano-positioning system using linear ultrasonic motor with “Shaking Beam”, Journal of Electroceramics, Vol.12, No.3, (2004), pp. 169-173.

5. Brecher C, Hirsch P, Weck M, Compensation of thermo-elastic machine tool deformation based on control internal data, CIRP Annals - Manufacturing Technology, Vol.53, No.1, (2004),pp. 299-304.

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