Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire
Author:
Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)
Subject
General Materials Science
Reference8 articles.
1. Bulk AlN crystal growth: self-seeding and seeding on 6H-SiC substrates
2. Wet KOH etching of freestanding AlN single crystals
3. Chemical mechanical polishing of freestanding GaN substrates
4. 6. D.Zhuanga, J.H.Edgara, B.Strojekb et al., J. Cryst. Growth, 89, 262 (2004).
5. Nitridation process of sapphire substrate surface and its effect on the growth of GaN
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1. Study on Polishing of Polycrystalline AlN Using Sol–Gel Polishing Tool;IEEE Transactions on Semiconductor Manufacturing;2022-11
2. Modeling and Experimental Study of Surfaces Optoelectronic Elements from Crystal Materials in Polishing;Springer Tracts in Mechanical Engineering;2018-12-31
3. Surface Roughness of Optoelectronic Components in Mechanical Polishing;Journal of Superhard Materials;2018-01
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5. Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics;Functional materials;2016-03-15
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