Surface preparation and homoepitaxial deposition of AlN on (0001)-oriented AlN substrates by metalorganic chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3467522
Reference31 articles.
1. Growth of high purity AlN crystals
2. Degradation of Aluminum Nitride Powder in an Aqueous Environmet
3. Surface composition of AlN powders studied by x‐ray photoelectron spectroscopy and bremsstrahlung‐excited Auger electron spectroscopy
4. Growth of Oxide Layers on Thin Aluminum Nitride Samples Measured by Electron Energy-Loss Spectroscopy
5. Cleaning of AlN and GaN surfaces
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