Subject
Inorganic Chemistry,General Materials Science
Reference27 articles.
1. Wang, Y., Liu, S., Peng, G., Zhou, S., and Xu, J., Effects of surface treatment on sapphire substrates, J. Crystal Growth, 2005, vol. 274, pp. 241–245.
2. Chen, X.F., Siche, D., Albrecht, M., Hartmann, C., Wollweber, J., and Xu, X.G., Surface preparation of AlN substrates, Crystal Res. Technol., 2008, vol. 43, issue 6, pp. 651–655.
3. Vovk, E.A., Budnikov, A.T., Nizhankovskyi, S.V., et al., Polishing of AlN/sapphire substrate obtained by thermochemical nitridation of sapphire, Funct. Mater., 2013, vol. 20, no. 2, pp. 253–258.
4. Satoh, I., Arakawa, S., Tanizaki, K., Miyanaga, M., Sakurada, T., Yamamoto, Y., and Nakahata, H., Development of aluminum nitride single-crystal substrates, SEI Techn. Rev., 2010, no. 71, pp. 78–82.
5. Filatov, Y.D., Filatov, O.Yu., Monteil, G., Heisel, U., and Storchak, M., Bound-abrasive grinding and polishing of surfaces of optical materials,Proc. SPIE, 2010, vol. 7786, art. 778613.
Cited by
21 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献