Surface preparation of AlN substrates
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference10 articles.
1. Bandgap engineering of electronic and optoelectronic devices on native AlN and GaN substrates: A modelling insight
2. Sublimation growth of AlN bulk crystals in Ta crucibles
3. Surface preparation of 4H–SiC substrates for hot-wall CVD of SiC layers
4. Growth of bulk AlN crystals by vaporization of aluminum in a nitrogen atmosphere
5. Growth and characterization of epitaxial layers on aluminum nitride substrates prepared from bulk, single crystals
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1. Silicon diffusion in AlN;Journal of Applied Physics;2023-09-06
2. Efficient diameter enlargement of bulk AlN single crystals with high structural quality;Applied Physics Express;2023-07-01
3. Dislocation Climb in AlN Crystals Grown at Low-Temperature Gradients Revealed by 3D X-ray Diffraction Imaging;Crystal Growth & Design;2023-01-26
4. Favourable growth conditions for the preparation of bulk AlN single crystals by PVT;CrystEngComm;2020
5. Optimization of the CMP Process with Colloidal Silica Performance for Bulk AlN Single Crystal Substrate;Korean Journal of Metals and Materials;2019-09-05
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