Properties of organosilicate low-k films with 1,3- and 1,3,5-benzene bridges between Si atoms-Reference-Cited by-同舟云学术

Properties of organosilicate low-k films with 1,3- and 1,3,5-benzene bridges between Si atoms

Published:2020-04-29 Issue:SL Volume:59 Page:SLLG01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Liu Chunhui,Lv Chunguang,Kohler Nicole,Wang Xuesong,Lin Hongxiao,He Zhiwei,Wu Yu-Hsuan,Leu Jihperng,Wei Shuhua^ORCID,Zhang Jing,Yan Jiang,Palov Alexander P.,Baklanov Mikhail R.

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

https://iopscience.iop.org/article/10.35848/1347-4065/ab86dc/pdf

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