Ta penetration into template-type porous low-k material during atomic layer deposition of TaN-Reference-Cited by-同舟云学术

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Ta penetration into template-type porous low-k material during atomic layer deposition of TaN

Published:2005-11 Issue:9 Volume:98 Page:094902
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Furuya Akira,Ohtsuka Nobuyuki,Misawa Kaori,Shimada Miyoko,Ogawa Shinichi

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2121937

Reference16 articles.

1. Proceedings of International Interconnect Technology Conference;Mourier T.,2003

2. Proceedings of Advanced Metallization Conference;Chen L.,2003

3. Proceedings of IEEE International Electron Devices Meeting;Tada M.,2003

4. Proceedings of Advanced Metallization Conference;Abell T.,2002

5. Proceedings of Advanced Metallization Conference;Donohue H.,2003

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