Abstract
Abstract
In this note, we demonstrate the high-temperature growth of GaN on ScAlMgO4 substrates by metalorganic vapor phase epitaxy when a thin Al film is deposited ex situ on the ScAlMgO4 surface, prior to GaN growth. Mirror-like high-quality GaN epitaxial layers were obtained when N2 was used as carrier gas during the reactor temperature ramp-up preceding GaN growth, leading to a higher GaN quality compared to direct growth on ScAlMgO4 using a trimethylaluminium preflow. This opens a pathway for high-temperature GaN growth on ScAlMgO4 when an Al precursor line is not present.
Funder
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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