Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height

Published:2009-06-22 Issue:6 Volume:48 Page:06FA04
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Terasawa Tsuneo,Yamane Takeshi,Tanaka Toshihiko,Iwasaki Teruo,Suga Osamu,Tomie Toshihisa

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference19 articles.

1. Inspection with the Lasertec M7360 at the SEMATECH Mask Blank Development Center

2. Defect inspection of EUV mask blank using confocal microscopy: simulation and experiment

3. Practical approach for modeling extreme ultraviolet lithography mask defects

4. Analysis of Printability of Scratch Defect on Reflective Mask in Extreme Ultraviolet Lithography

5. Multilayer bottom topography effect on actinic mask-blank inspection signal

Cited by 34 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 极紫外探测器的研究进展;Chinese Journal of Lasers;2024

2. Source performance metrics for EUV mask inspection;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-03-08

3. Actual defect observation results of an extreme-ultraviolet blank mask by coherent diffraction imaging;Applied Physics Express;2016-02-09

4. Characterization of small phase defects using a micro-coherent extreme ultraviolet scatterometry microscope;Japanese Journal of Applied Physics;2014-05-27

5. Improvement of defect mitigation with EUV actinic blank inspection prototype for 16 nm hp;SPIE Proceedings;2014-04-17

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3