Surface Treatment of Flat Panel Display Substrates by a Uniform Large Area Glow Cold Plasma Tunnel at Atmospheric Pressure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference15 articles.
1. The effects of glass-substrate’s surface-treatment on the characteristics of N-channel polycrystalline silicon thin film transistors
2. Photoresist Etching by Atmospheric Pressure Uniform-Glow Plasma
3. Localized Removal of a Photoresist by Atmospheric Pressure Micro-plasma Jet Using RF Corona Discharge
4. Discharge comparison of nonequilibrium atmospheric pressure Ar/O2 and He/O2 plasma jets
5. Oxygen plasma etching for resist stripping and multilayer lithography
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The enhancement effect and competition behavior of a flash evaporation system with a continuous DC glow discharge plasma;International Journal of Heat and Mass Transfer;2021-12
2. In-Situ Optical Monitoring of Atmospheric Pressure Plasma During Organic Surface Removal;Science of Advanced Materials;2021-11-01
3. Microfluidic Transport Through Microsized Holes Treated by Nonequilibrium Atmospheric-Pressure Plasma;IEEE Transactions on Plasma Science;2016-12
4. Demonstration of organic volatile decomposition and bacterial sterilization by miniature dielectric barrier discharges on low-temperature cofired ceramic electrodes;Japanese Journal of Applied Physics;2016-03-01
5. Development of Active Oxygen Monitor and its Utilization for Surface Treatment Process;Journal of the Vacuum Society of Japan;2012
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3