Surface Cleaning of Gold Structure by Annealing during Fabrication of Microelectromechanical System Devices
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
1. Microfabrication technology for high-speed Si-based systems
2. Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
3. Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
4. Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator
5. Conformal Coating of Organic Dielectric Film on Gold Electrodes in Microelectromechanical System Devices by Electrodeposition
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5. Formation and decomposition of gold oxides prepared by an oxygen-dc glow discharge from gold films and studied by X-ray photoelectron spectroscopy;THIN SOLID FILMS;2020
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