Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator-Reference-Cited by-同舟云学术

Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator

Published:2007-09-07 Issue:9A Volume:46 Page:6062-6067
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Sato Norio,Kuwabara Kei,Ono Kazuyoshi,Sakata Tomomi,Morimura Hiroki,Terada Jun,Kudou Kazuhisa,Kamei Toshikazu,Yano Masaki,Machida Katsuyuki,Ishii Hiromu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference6 articles.

1. Feasibility of micro power supplies for MEMS

2. Micromachined CMOS thermoelectric generators as on-chip power supply

3. Self-powered signal processing using vibration-based power generation

4. Microfabrication technology for high-speed Si-based systems

5. A batch-fabricated silicon thermopile infrared detector

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MXenes and the progress of Li–S battery development—a perspective;Journal of Physics: Energy;2021-03-01

2. Enhanced Thermoelectric Characteristics of Ag2Se Nanoparticle Thin Films by Embedding Silicon Nanowires;Energies;2020-06-13

3. Bendable thermoelectric generators composed of p- and n-type silver chalcogenide nanoparticle thin films;Nano Energy;2018-07

4. Improved Thermoelectric Power of HgTe Nanoparticle Thin Films Embedded with Ag Nanoparticles;Journal of Nanoscience and Nanotechnology;2016-10-01

5. Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology;Micromachines;2015-10-16