Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes-Reference-Cited by-同舟云学术

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Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes

Published:2004-09-09 Issue:9A Volume:43 Page:6468-6472
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ishii Hiromu,Urano Masami,Tanabe Yasuyuki,Shimamura Toshishige,Yamaguchi Joji,Kamei Toshikazu,Kudou Kazuhisa,Yano Masaki,Uenishi Yuji,Machida Katsuyuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scaling Limits of MEMS Beam-Steering Switches for Data Center Networks;Journal of Lightwave Technology;2015-08-01

2. Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches;Precision Engineering;2013-10

3. (Invited) Bio-MEMS Chip for Bacteria Detection -A Challenge of Si Technology to Biomedical Field-;ECS Transactions;2013-08-31

4. Elimination of Curvature in Microelectromechanical-System Membrane;ECS Transactions;2013-05-03

5. Deformation and Restoration of Shape in Microelectromechanical System Membrane;ECS Journal of Solid State Science and Technology;2013

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