Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference18 articles.
1. Microplasmas and applications
2. Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning
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4. Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing
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1. Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma;Scientific Reports;2022-11-27
2. Low‐temperature reduction of SnO 2 by floating wire‐assisted medium‐pressure H 2 /Ar plasma;Plasma Processes and Polymers;2022-02-21
3. Development and Characterization of Ion Mobility Spectrometer;Plasma and Fusion Research;2019-06-03
4. Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass;Journal of Applied Physics;2019-02-14
5. The transfer of atmospheric-pressure ionization waves via a metal wire;Physics of Plasmas;2016-01
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