Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass
Author:
Affiliation:
1. Nagoya University, Nagoya 464-8603, Japan
2. Toyota Technological Institute, Nagoya 468-8511, Japan
3. AGC Inc., Yokohama 230-0045, Japan
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5081875
Reference35 articles.
1. Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode
2. Atmospheric pressure plasmas: A review
3. M. I. Boulos, P. Fauchais, and E. Pfender, Thermal Plasmas: Fundamental and Applications (Plenum Press, New York, 1994), p. 452.
4. The atmospheric-pressure plasma jet: a review and comparison to other plasma sources
5. An atmospheric pressure plasma source
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