Various Fatigue Testing of Polycrystalline Silicon Microcantilever Beam in Bending
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference19 articles.
1. A new technique for measuring the mechanical properties of thin films
2. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
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