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Microscale materials testing using MEMS actuators

Published:2001-03 Issue:1 Volume:10 Page:146-152
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Haque M.A.,Saif M.T.A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/19662/00911103.pdf?arnumber=911103

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