The design of high strength electro-thermal micro-actuator based on the genetic algorithm-Reference-Cited by-同舟云学术

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The design of high strength electro-thermal micro-actuator based on the genetic algorithm

Published:2019-09-21 Issue:4 Volume:26 Page:1113-1119
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Hsieh Jui-Ching,Lin David T. W.^ORCID,Suen Min-Sheng

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-019-04637-3.pdf

Reference15 articles.

1. Alcheikh N, Tella SA, Younis MI (2018) Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads. Sens Actuators A 273:19–29

2. Bromley SC, Howell LL, Jensen BD (1999) Determination of maximum allowable strain for polysilicon micro-devices. Eng Fail Anal 6:27–41

3. Chen WC, Lee C, Wu CY, Fang W (2005) A new latched 2 × 2 optical switch using bi-directional movable electrothermal H-beam actuators. Sens Actuators 123–124:563–569

4. Cheng P, Zhang Y, Mao S, Wang H, Ding G, Zhang C, Dai X, Zhao X (2014) Novel electro-thermal latching micro-switch based on Ni/electro-phoreticpolymer micro-cantilevels. J Micromech Microeng 24:125015

5. de Godoy PH, Silva ECN (2007) Aspects of fabrication and characterization of electro-thermal micro-actuators. J Braz Soc Mech Sci Eng 29:S1678–58782007000100005

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