Author:
Tsuchiya Toshiyuki,Shikida Mitsuhiro,Sato Kazuo
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. H. Ogawa, K. Suzuki, S. Kaneko, Y. Nakano, Y. Ishikawa, T. Kitahara, Measurement of Mechanical Properties of Microfabricated Thin Films, in: Proceedings of the MEMS’97, Nagoya, Japan, 1997, pp. 430–435.
2. Electrostatically actuated failure of micro-fabricated polysilicon fracture mechanics specimens;Kahn;Proc. R. Soc. Lond. A,1999
3. Tensile testing of silicon film having different crystallographic orientation carried out on a silicon chip;Sato;Sensors and Actuators A,1998
4. Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films;Tsuchiya;J. Microelectromechanical Syst.,1998
5. Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films;Tsuchiya;Sensors and Actuators A,2000
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23 articles.
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