Author:
Smith Bruce W.,Suzuki Kazuaki
Cited by
26 articles.
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1. Biomimetic Optics;Biomimicry Materials and Applications;2023-08-25
2. TEMPO: Fast Mask Topography Effect Modeling with Deep Learning;Proceedings of the 2020 International Symposium on Physical Design;2020-03-20
3. Studying the Formation of Antireflection Coatings on Multijunction Solar Cells;Technical Physics Letters;2019-10
4. Alternative Developer Solutions and Processes for EUV and ArFi Lithography;Journal of Photopolymer Science and Technology;2019-06-24
5. Rapid image-based pupil plane characterization for EUV lithography systems;International Conference on Extreme Ultraviolet Lithography 2018;2018-10-09