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Characterization of Nanoimprint Resin and Antisticking Layer by Scanning Probe Microscopy

  • Published:2009 Issue:2 Volume:22 Page:167-169
  • ISSN:0914-9244
  • Container-title:Journal of Photopolymer Science and Technology
  • language:en
  • Short-container-title:J. Photopol. Sci. Technol.

Author:

Okada Makoto,Kang Yuji,Nakamatsu Ken-ichiro,Iwasa Masayuki,Kanda Kazuhiro,Haruyama Yuichi,Matsui Shinji

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Prototyping of microelectrode devices applied by transfer printing;Japanese Journal of Applied Physics;2024-06-03

2. Stamp Surface Treatment;Nanoimprint Lithography: An Enabling Process for Nanofabrication;2012-10-29

3. Evaluation of oxygen inhibition for UV-curable resins by adhesion force measurement using scanning probe microscope;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11

4. Growth Behavior of an Adsorbed Monolayer from a Benzophenone-Containing Trimethoxysilane Derivative on a Fused Silica Surface for Nanoimprint Molds by Chemical Vapor Surface Modification;Japanese Journal of Applied Physics;2010-06-21
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