Evaluation of oxygen inhibition for UV-curable resins by adhesion force measurement using scanning probe microscope-Reference-Cited by-同舟云学术

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Evaluation of oxygen inhibition for UV-curable resins by adhesion force measurement using scanning probe microscope

Published:2010-11 Issue:6 Volume:28 Page:C6M17-C6M22
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Okada Makoto,Iwasa Masayuki,Miyake Hiroto,Ohsaki Takeshi,Haruyama Yuichi,Kanda Kazuhiro,Matsui Shinji

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3517511

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tapping atomic force microscopy imaging at phase resonance;2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2021-08-02

2. Development of a soft UV-NIL step&repeat and lift-off process chain for high speed metal nanomesh fabrication;Nanotechnology;2020-06-11

3. Meniscus behavior under helium exposure for rapid resist spreading during nanoimprint lithography;Japanese Journal of Applied Physics;2018-09-21

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