Issues and Requirements of Polymers for Thermal NIL-Reference-Cited by-同舟云学术

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Issues and Requirements of Polymers for Thermal NIL

Published:2007 Issue:4 Volume:20 Page:539-544
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Scheer H.-C.,Wissen M.,Bogdanski N.,Möllenbeck S.

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

http://www.jstage.jst.go.jp/article/photopolymer/20/4/20_4_539/_pdf

Reference17 articles.

1. 1. S. Y. Chou et al, J. Vac. Sci. Technol., B15 (1997) 2897

2. 2. S. Y. Chou, P. R. Krauss and P. J. Renstrom, J. Vac. Sci. Technol., B14 (1996), 4129

3. 3. X. D. Huang et al, J. Vac. Sci. Technol., B20 (2002) 2872

4. 4. C. Gourgan et al, J. Vac. Sci. Technol., B21 (2003) 98

5. 5. J. Stefan, Akad. Wiss. Math. Natur., 69 (1864), 713

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