Nanoimprint lithography (NIL) and related techniques for electronics applications
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Publisher
Elsevier
Link
http://woodhead.metapress.com/index/Q75L78253V213256.pdf
Reference118 articles.
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2. ‘Low temperature nanoimprint lithography using silicon nitride molds;Alkaisi;Microelectronic Engineering,2001
3. Residue-free room temperature UV-nanoimprinting of submicron organic thin film transistors;Auner;Organic Electronics,2009
4. High-performing submicron organic thin-film transistors fabricated by residue-free embossing;Auner;Organic Electronics,2010
5. Multiple imprinting in UV-based nanoimprint lithography: related material issues;Bender;Microelectronic Engineering,2002
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