Developing a predictive model for nanoimprint lithography using artificial neural networks

Author:

Akter Tahmina,Desai Salil

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference87 articles.

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2. Imprint of sub25nm vias and trenches in polymers imprint of sub-25nm vias and trenches in polymers;Chou;Appl. Phys. Lett.,1995

3. Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting;Ahn;ACS Nano,2009

4. Pattern transfer fidelity of nanoimprint lithography on six-inch wafers;Li;Nanotechnology,2003

5. Fast flexible thin-film transistors with deep submicron channel enabled by nanoimprint lithography;Seo,2016

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