Readiness of EUV Lithography for Insertion into Manufacturing: The IMEC EUV Program-Reference-Cited by-同舟云学术

Readiness of EUV Lithography for Insertion into Manufacturing: The IMEC EUV Program

Published:2013 Issue:5 Volume:26 Page:587-593
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Hendrickx Eric,Gronheid Roel,Hermans Jan,Lorusso Gian,Foubert Philippe,Pollentier Ivan,Goethals Anne-Marie,Jonckheere Rik,Vandenberghe Geert,Ronse Kurt

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/26/5/26_587/_pdf

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