Author:
Ito H.,Truong H.D.,Okazaki M.,DiPietro R.A.
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference46 articles.
1. 1. H. Ito, in Desk Reference of Functional Polymers, R. Arshady, ed., American Chemical Society, Washington, D.C., p.311, 1997.
2. Synthesis, Radiation Degradation, and Electron Beam Resist Behavior of Fluorine‐Containing Vinyl Polymers
3. Deep-UV Photolithography
4. Outlook for 157-nm resist design
5. Polymerization of methyl α-(trifluoromethyl)acrylate and .alpha.-trifluoromethylacrylonitrile and copolymerization of these monomers with methyl methacrylate
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