Synthesis, Radiation Degradation, and Electron Beam Resist Behavior of Fluorine‐Containing Vinyl Polymers-Reference-Cited by-同舟云学术

Synthesis, Radiation Degradation, and Electron Beam Resist Behavior of Fluorine‐Containing Vinyl Polymers

Published:1981-08-01 Issue:8 Volume:128 Page:1758-1762
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Pittman C. U.¹²³,Ueda M.¹²³,Chen C. Y.¹²³,Kwiatkowski J. H.¹²³,Cook C. F.¹²³,Helbert J. N.¹²³

Affiliation:

1. Department of Chemistry, University of Alabama, University, Alabama 35486

2. US Army Electronics Technology and Devices Laboratory, Fort Monmouth, New Jersey 07703

3. Motorola SG/SRDL, Phoenix, Arizona 85008

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2127726/pdf

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