Affiliation:
1. National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference33 articles.
1. 1. J. Haisma, M. Verheijen, K. Heuvel, and J. Berg, J. Vac. Sci. Technol. B, 14 (1996) 4124.
2. 2. M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C. G. Willson, Proc. SPIE, 3676 (1999) 379.
3. 3. M. Komuro, J. Taniguchi, S. Inoue, N. Kimura, Y. Tokano, H. Hiroshima, and S. Matsui, Jpn. J. Appl. Phys., 39 (2000) 7075.
4. 4. D. J. Resnick, W. J. Dauksher, D. Mancini, K. J. Nordquist, T. C. Bailey, S. Johnson, N. Stacey, J. G. Ekerdt, C. G. Willson, S. V. Sreenivasan, and N. Schumaker, J. Vac. Sci. Technol. B, 21 (2003) 2624.
5. 5. D. J. Resnick, W. J. Dauksher, D. Mancini, K. J. Nordquist, T. C. Bailey, S. Johnson, N. Stacey, J. G. Ekerdt, C. G. Willson, S. V. Sreenivasan, and N. Schumaker, J. Vac. Sci. Technol. B, 21 (2003) 2624.
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